What is SEMI F47?

SEMI F47-0706 (Reapproved 0812) is an industry standard for voltage sag immunity. It says that industrial equipment must tolerate voltage sags, or dips, on the AC mains supply to specific depths and durations. It is such a good and useful standard that many other industries use it, either formally or informally.

Equipment that complies with SEMI F47 is more reliable, and more productive.

SEMI F47 is an industry standard that sets out, in six pages, the requirements for voltage sag immunity in semiconductor fab equipment.