SEMI F47 FOR TOOL MANUFACTURERS AND END-USERS

Voltage Sag Immunity for semiconductor manufacturing tools, sub-systems and components.

Every modern semiconductor manufacturing tool can be sensitive to brief disturbances on the AC power mains. Electrical systems are subject to a wide variety of power quality problems which can interrupt production processes, affect sensitive equipment, and cause downtime, scrap, and capacity losses. The most common disturbance, by far, is a brief reduction in voltage, lasting for a few hundred milliseconds. These ‘voltage sags’ (in American English) or ‘voltage dips’ (in British English) are the most common power problem encountered in semiconductor Fabs around the world.